Issue 4 (1), pp. 20-47, 2026

References

[1] S.V. Samojlenkov, A.I. Kuchaev, S.S. Ivanov, A.R. Kaul’. Lenty na osnove vysokotemperaturnyh sverhprovodnikov: tekhnologii i perspektivnye primeneniya. Mezhdunarodnyj nauchnyj zhurnal Al’ternativnaya energetika i ekologiya 10 (102), 140 (2011).
[2] X.M. Xiong, Y.L. Zhou, H.B. Lu, Z.H. Chen, G.Z. Yang. Preparation of Y-Ba-Cu-O films on polycrystalline metal substrates with biaxially aligned yttria-stabilized zirconia buffer layers deposited by ion beam assisted pulsed laser deposition. Physica C: Superconductivity 298, 178 (1998). DOI: 10.1016/S0921-4534(98)00041-0
[3] A. Goyal A. Tokonesushchie lenty vtorogo pokoleniya na osnove vysokotemperaturnyh sverhprovodnikov. M.: Izdatel’stvo LKI, 2009.
[4] A. Sundaram, Y. Zhang, A.R. Knoll, et al. 2G HTS wires made on 30 μm thick Hastelloy substrate. Superconductor Science and Technology 29, 104007 (2016). DOI: 10.1088/0953-2048/29/10/104007
[5] A. Molodyk, S. Samoilenkov, A. Markelov, et al. Development and large volume production of extremely high current density YBa₂Cu₃O₇ superconducting wires for fusion. Scientific Reports 11, 2084 (2021). DOI: 10.1038/s41598-021-81559-z
[6] A. Usoskin, U. Betz, J. Gnilsen, S. Noll-Baumann, K. Schlenga. Long-length YBCO coated conductors for ultra-high field applications: gaining engineering current density via pulsed laser deposition/alternating beam-assisted deposition route. Superconductor Science and Technology 32, 094005 (2019). DOI: 10.1088/1361-6668/AB2CBA
[7] J. Chung, C.J. Kim, S.M. Choi, S.I. Yoo, K.M. Shin. TEM analysis of the interfacial defects in the superconducting GdBa₂Cu₃O_7−δ tapes synthesized by IBAD-PLD. Physica C: Superconductivity and its Applications 463u2013465, 722 (2007). DOI: 10.1016/J.PHYSC.2007.04.327
[8] A.E. Ieshkin, A.B. Tolstoguzov, N.G. Korobejshchikov, V.O. Pelenovich, V.S. Chernysh. Gazodinamicheskie istochniki klasternyh ionov dlya resheniya fundamental’nyh i prikladnyh zadach. Uspekhi fizicheskih nauk 192, 7, 722 (2022).
[9] Y. Yao, J. Zhang, W.M. Freund, S. Tran, W. Kong. The scaling law of cluster sizes revisited: Clusters formed via coexpansion of a molecular and a rare gas species. Chemical Physics Letters 813, 140312 (2023). DOI: 10.1016/j.cplett.2023.140312
[10] N.G. Korobeishchikov, I.V. Nikolaev, M.A. Roenko. Diagnostics of argon cluster ion beam for materials treatment. Journal of Physics: Conference Series 1115, 032016 (2018). DOI: 10.1088/1742-6596/1115/3/032016
[11] A.E. Ieshkin, A.V. Danilov, V.S. Chernysh, I.E. Ivanov, I.A. Znamenskaya. Visualization of supersonic flows with bow shock using transversal discharges. Journal of Visualization 22, 741 (2019). DOI: 10.1007/S12650-019-00565-6/FIGURES/8
[12] A. Ieshkin, Y. Ermakov, V. Chernysh, et al. Computer simulation and visualization of supersonic jet for gas cluster equipment. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 795, 395 (2015). DOI: 10.1016/j.nima.2015.06.026
[13] N.G. Korobeishchikov, V.V. Kalyada, P.A. Skovorodko, et al. Features of formation of gas cluster ion beams. Vacuum 119, 256 (2015). DOI: 10.1016/j.vacuum.2015.05.039
[14] D.S. Kireev, A.V. Danilov, A.E. Ieshkin, V.S. Chernysh. Cluster ion accelerator and its application for high-precision surface polishing. Vestnik of Ryazan State Radio Engineering University 66-2, 40 (2018). DOI: 10.21667/1995-4565-2018-66-4-2-40-48
[15] N. Toyoda, I. Yamada. Evaluation of charge state of gas cluster ions by means of individual crater observations. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 307, 269 (2013). DOI: 10.1016/j.nimb.2012.11.074
[16] X. Zeng, V. Pelenovich, Z. Wang, et al. Sputtering of silicon nanopowders by an argon cluster ion beam. Beilstein Journal of Nanotechnology 10, 135 (2019). DOI: 10.3762/BJNANO.10.13
[17] V. N. Popok, I. Barke, E.E.B. Campbell, K.H. Meiwes-Broer. Cluster-surface interaction: From soft landing to implantation. Surface Science Reports 66, 347 (2011). DOI: 10.1016/j.surfrep.2011.05.002
[18] I. Yamada, J. Matsuo, N. Toyoda, A. Kirkpatrick. Materials processing by gas cluster ion beams. Materials Science and Engineering: R: Reports 34, 231 (2001). DOI: 10.1016/S0927-796X(01)00034-1
[19] P. Sigmund. Collision cascades and sputtering induced by larger cluster ions. Journal de Physique Colloques 50, C2, 175 (1989).
[20] Z. Pan, P. Sigmund. Interaction of slow (100 ev/atom) carbon clusters with gold: Penetration properties and collision cascades. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 51, 344 (1990). DOI: 10.1016/0168-583X(90)90552-6
[21] V.I. Shulga, P. Sigmund. Penetration of slow gold clusters through silicon. Nuclear Inst. and Methods in Physics Research, B 47, 236 (1990). DOI: 10.1016/0168-583X(90)90751-F
[22] V.I. Shulga, P. Sigmund. Interaction of slow (100 eV/atom) copper clusters with thin gold films: reflection, transmission, and sputtering at normal and oblique incidence. Nuclear Inst. and Methods in Physics Research, B 62, 23 (1991). DOI: 10.1016/0168-583X(91)95923-2
[23] M. Döbeli, P.W. Nebiker, R. Mühle, M. Suter. Sputtering and defect production by focused gold cluster ion beam irradiation of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 132, 571 (1997). DOI: 10.1016/S0168-583X(97)00499-0
[24] H.H. Andersen, A. Brunelle, S. Della-Negra, et al. Giant Metal Sputtering Yields Induced by 20–5000 keV/atom Gold Clusters. Physical Review Letters 80, 5433 (1998). DOI: 10.1103/PhysRevLett.80.5433
[25] A. Tolstoguzov, A.E. Ieshkin, I.K. Gainullin, P. Mazarov. Sputtering of coinage metals with bismuth cluster ions: Experiment and computer simulation. Vacuum 213, 112070 (2023). DOI: 10.1016/j.vacuum.2023.112070
[26] A.B. Tolstoguzov, P.A. Mazarov, A.E. Ieshkin, F. Meyer, D.J. Fu. Nonlinear effects in the
sputtering of gallium arsenide and silicon by bismuth cluster ions. Technical Physics Letters 48, 18 (2022). DOI: 10.21883/TPL.2022.03.52875.19071
[27] Y. Yamamura. Sputtering by cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 33, 493 (1988). DOI: 10.1016/0168-583X(88)90615-5
[28] J. Matsuo, N. Toyoda, M. Akizuki, I. Yamada. Sputtering of elemental metals by Ar cluster ions. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 121, 459 (1997). DOI: 10.1016/S0168-583X(96)00541-1
[29] J. Matsuo, S. Ninomiya, Y. Nakata, K. Ichiki, T. Aoki, T. Seki. Size effect in cluster collision on solid surfaces. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 257, 627 (2007). DOI: 10.1016/j.nimb.2007.01.164
[30] N. Toyoda, I. Yamada. Size effects of gas cluster ions on beam transport, amorphous layer formation and sputtering. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267, 1415 (2009). DOI: 10.1016/j.nimb.2009.01.055
[31 ] K. Nakamura, S. Houzumi, N. Toyoda, K. Mochiji, T. Mitamura, I. Yamada. Cluster size dependences of bombardment effects using mass-selected gas cluster ion beams. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 261, 660 (2007). DOI: 10.1016/j.nimb.2007.04.268
[32] T. Seki, T. Murase, J. Matsuo. Cluster size dependence of sputtering yield by cluster ion beam irradiation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 242, 179 (2006). DOI: 10.1016/j.nimb.2005.08.023
[33] C. Anders, H.M. Urbassek, R.E. Johnson. Linearity and additivity in cluster-induced sputtering: A molecular-dynamics study of van der Waals bonded systems. Physical Review B 70, 155404 (2004). DOI: 10.1103/PhysRevB.70.155404
[34] M.P. Seah. Universal equation for argon gas cluster sputtering yields. Journal of Physical Chemistry C 117, 12622 (2013). DOI:10.1021/jp402684c
[35] L. Yang, M.P. Seah, I.S. Gilmore. Sputtering yields for gold using argon gas cluster ion beams. Journal of Physical Chemistry C 116, 23735 (2012). DOI: 10.1021/jp307203f
[36] R.J. Paruch, B.J. Garrison, M. Mlynek, Z. Postawa. On Universality in Sputtering Yields Due to Cluster Bombardment. The Journal of Physical Chemistry Letters 5, 3227 (2014). DOI:10.1021/jz501545t
[37] R.J. Paruch, Z. Postawa, B.J. Garrison. Seduction of Finding Universality in Sputtering Yields
Due to Cluster Bombardment of Solids. Accounts of Chemical Research 48, 2529 (2015). DOI: 10.1021/acs.accounts.5b00303
[38] A.V. Nazarov, V.S. Chernysh, A.D. Zavilgelsky, et al. The cluster species effect on the noble gas cluster interaction with solid surfaces. Surfaces and Interfaces 26, 101397 (2021). DOI: 10.1016/j.surfin.2021.101397
[39] R.J. Paruch, Z. Postawa, B.J. Garrison. Physical basis of energy per cluster atom in the universal concept of sputtering. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 34, 3, (2016). DOI: 10.1116/1.4940153
[40] A.E. Ieshkin, A.V. Nazarov, A.A. Tatarintsev, et al. Energy distributions of the particles sputtered by gas cluster ions. Experiment and computer simulation. Surface and Coatings Technology 404, 126505 (2020). DOI: 10.1016/j.surfcoat.2020.126505
[41] A.V. Nazarov, A.D. Zavilgelskiy, A.E. Ieshkin, et al. On the angular distributions of atoms sputtered by gas cluster ion beam. Vacuum 212, 112061 (2023). DOI: 10.1016/j.vacuum.2023.112061
[42] S. Gouasmia Boussahoul, M. Benguerba. Modeling of Sputtering from Solid Surfaces Under Argon Cluster Bombardments: Comparison With Experimental and Simulated Data. Applied Surface Science 703, 163428 (2025). DOI: 10.1016/j.apsusc.2025.163428
[43] M. Benguerba. A model for sputtering from solid surfaces bombarded by energetic clusters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 420, 27 (2018). DOI: 10.1016/j.nimb.2018.01.030
[44] R.M. Bradley, J.M.E. Harper. Theory of ripple topography induced by ion bombardment. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 6, 2390 (1988). DOI:10.1116/1.575561
[45] N. Toyoda, H. Kitani, N. Hagiwara, T. Aoki, J. Matsuo, I. Yamada. Angular distributions of the particles sputtered with Ar cluster ions. Materials Chemistry and Physics 54, 262 (1998). DOI: 10.1016/S0254-0584(98)00101-1
[46] N. Toyoda, N. Hagiwara, J. Matsuo, I. Yamada. Surface smoothing mechanism of gas cluster ion beams. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161, 980 (2000). DOI: 10.1016/S0168-583X(99)00771-5
[47] Z. Insepov, I. Yamada, M. Sosnowski. Sputterring and smoothing of metal surface with energetic gas cluster beams. Materials Chemistry and Physics 54, 234 (1998). DOI: 10.1016/S0254-0584(98)00032-7
[48] I. Yamada, J. Matsuo, Z. Insepov, T. Aoki, T. Seki, N. Toyoda. Nano-processing with gas cluster ion beams. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 164-165, 944 (2000). DOI: 10.1016/S0168-583X(99)01163-5
[49] E. Bourelle, A. Suzuki, A. Sato, T. Seki, J. Matsuo. Sidewall polishing with a gas cluster ion beam for photonic device applications. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 241, 622 (2005). DOI: 10.1016/j.nimb.2005.07.087
[50] K.G. Xie, Y. Xie, H. Deng. Gas Cluster Ion Beam Smoothing Technique: A Review. Nanomanufacturing and Metrology 8, 12 (2025). DOI: 10.1007/s41871-025-00256-x
[51] A.Yoshida, M. Deguchi, M. Kitabatake, et al. Atomic level smoothing of CVD diamond films by gas cluster ion beam etching. Nuclear Instruments and Methods in Physics Research Section B 248 (1996).
[52] K. Nagato, N. Toyoda, H. Naito, et al. Effect of duty ratio of patterned surface on planarization by gas cluster ion beams. Journal of Applied Physics 109, 7, (2011). DOI: 10.1063/1.3556783
[53] A.E. Ieshkin, K.D. Kushkina, D.S. Kireev, Y.A. Ermakov, V.S. Chernysh. Polishing superhard material surfaces with gas cluster ion beams. Technical Physics Letters 43, 95 (2017). DOI: 10.1134/S1063785017010205
[54] A.E. Ieshkin, D.S. Kireev, Yu.A. Ermakov, et al. The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 421, 27 (2018). DOI: 10.1016/j.nimb.2018.02.019
[55] I.V. Nikolaev, N.G. Korobejshchikov, A.V. Lapega. Vliyanie ionno-klasternoj bombardirovki na grubo polirovannuyu poverhnost’ plastin monokristallicheskogo germaniya. Vestnik Moskovskogo Universiteta. Seriya 3. Fizika. Astronomiya 3, 2430301 (2024). DOI: 10.55959/msu0579-9392.79.2430301
[56] I.V. Nikolaev, N.G. Korobejshchikov. Osobennosti ionno-klasternoj obrabotki poverhnosti monokristalla KGd(WO4)2:Nd. Poverhnost’. Rentgenovskie, sinhrotronnye i nejtronnye issledovaniya 3, 65 (2024).
[57] V. Pelenovich, X.-M. Zeng, J.-B. Luo, et al. Double-step gas cluster ion beam smoothing. Acta Physica Sinica 70, 053601 (2021). DOI:10.7498/aps.70.20201454
[58] L.P. Allen, Z. Insepov, D.B. Fenner, et al. Craters on silicon surfaces created by gas cluster ion impacts. Journal of Applied Physics 92, 3671 (2002). DOI: 10.1063/1.1506422
[59] R.C. Birtcher, J. Matsuo, I. Yamada. Craters produced on Al, Cu and Au by Ar cluster impacts. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 175-177, 36 (2001). DOI: 10.1016/S0168-583X(00)00626-1
[60] S. Prasalovich, V. Popok, P. Persson, E.E.B. Campbell EEB. Experimental studies of complex crater formation under cluster implantation of solids. European Physical Journal D 36, 79 (2005). DOI: 10.1140/epjd/e2005-00197-2
[61] V.N. Popok, J. Jensen, S. Vuković, A. MacKova, C. Trautmann. Formation of surface nanostructures on rutile (TiO2): Comparative study of low-energy cluster ion and high-energy monoatomic ion impact. Journal of Physics D: Applied Physics 42, 20, (2009). DOI:10.1088/0022-3727/42/20/205303
[62] J. Samela, K. Nordlund. Atomistic simulation of the transition from atomistic to macroscopic cratering. Physical Review Letters 101, 027601 (2008). DOI: 10.1103/PHYSREVLETT.101.027601/FIGURES/5/MEDIUM
[63] C. Anders, G. Ziegenhain, S. Zimmermann, H.M. Urbassek. Cluster-induced crater formation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 267, 3122 (2009). DOI: 10.1016/j.nimb.2009.07.002
[64] C. Anders, E.M. Bringa, F.D. Fioretti, G. Ziegenhain, H.M. Urbassek. Crater formation caused by nanoparticle impact: A molecular dynamics study of crater volume and shape. Physical Review B – Condensed Matter and Materials Physics 85, 235440 (2012). DOI:10.1103/PhysRevB.85.235440
[65] F. Djurabekova, J. Samela, H. Timko, et al. Crater formation by single ions, cluster ions and ionu2018 showers. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 272, 374 (2012). DOI: 10.1016/j.nimb.2011.01.104
[66] T. Aoki, T. Seki, S. Ninomiya, K. Ichiki, J. Matsuo. Study of crater formation and sputtering process with large gas cluster impact by molecular dynamics simulations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 267, 1424 (2009). DOI: 10.1016/J.NIMB.2009.01.162
[67] T. Aoki, T. Seki, J. Matsuo. Molecular dynamics simulations for gas cluster ion beam processes. Vacuum 84, 994 (2010). DOI: 10.1016/j.vacuum.2009.11.018
[68] Z. Insepov, L.P. Allen, C. Santeufemio, K.S. Jones, I. Yamada. Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 202, 261 (2003). DOI:10.1016/S0168-583X(02)01867-0
[69] K. Nordlund, T.T. Järvi, K. Meinander, J. Samela. Cluster ion-solid interactions from meV to MeV energies. Applied Physics A: Materials Science and Processing 91, 561 (2008). DOI: 10.1007/S00339-008-4514-2/METRICS
[70] N. Toyoda, A. Kimura, I. Yamada. Isolated crater formation by gas cluster ion impact and their use as templates for carbon nanotube growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 371, 317 (2016). DOI: 10.1016/j.nimb.2015.11.021
[71] D.S. Kireev, M.O. Ryabtsev, A.A. Tatarintsev, A.E. Ieshkin. On the origin of nanoripples on silicon by gas cluster-ion irradiation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 520, 8 (2022). DOI: 10.1016/J.NIMB.2022.03.017
[72] Q. Huang, Q. jia, J. Feng, et al. Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy. Nature Communications 10, 2437 (2019). DOI: 10.1038/s41467-019-10095-2
[73] N. Toyoda, B. Tilakaratne, I. Saleem, W.K. Chu. Cluster beams, nano-ripples, and bio applications. Applied Physics Reviews 6, 2, (2019). DOI: 10.1063/1.5030500
[74] O. Lozano, Q.Y. Chen, B.P. Tilakaratne, et al. Evolution of nanoripples on silicon by gas clusterion irradiation. AIP Advances 3, 6, (2013). DOI: 10.1063/1.4811171
[75] N.G. Korobeishchikov, I.V. Nikolaev, A.V. Lapega. Efficient nanopatterning of Ge surface induced by oblique argon cluster ion beam. Materials Letters 368, 136710 (2024). DOI: 10.1016/j.matlet.2024.136710
[76] A. Ieshkin, D. Kireev, K. Ozerova, B. Senatulin. Surface ripples induced by gas cluster ion beam on copper surface at elevated temperatures. Materials Letters 272, 127829 (2020). DOI: 10.1016/j.matlet.2020.127829
[77] D.P. Linklater, V.A. Baulin, S. Juodkazis, R.J. Crawford, P. Stoodley, E.P. Ivanova. Mechanobactericidal actions of nanostructured surfaces. Nature Reviews Microbiology 19, 8 (2021). DOI: 10.1038/s41579-020-0414-z
[78] J. Khoury, T. Zhang, D.B. Earle, M.L. Forrest. Accelerated neutral atom beam (ANAB) and gas clustered ion beam (GCIB) treatment of implantable device polymers leads to decreased bacterial attachment in vitro and decreased inflammation in vivo. Engineered Regeneration 4, 257 (2023). DOI: 10.1016/j.engreg.2023.03.006
[79] M. Saini, S. Augustine, M. Ranjan, T. Som. In-plane optical anisotropy and SERS detection efficiency of self-organized gold nanoparticles on silicon nanoripples: Roles of growth angle and postgrowth annealing. Applied Surface Science 512, 145703 (2020). DOI: 10.1016/j.apsusc.2020.145703
[80] S. Zhao, Y. Zhao, Y. Ran, et al. Surface enhanced Raman scattering on ion-beam-deposited TiN_x/Si substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 472, 24 (2020). DOI: 10.1016/j.nimb.2020.03.008
[81] D.S. Kireev, O.A. Streletskiy, A.A. Tatarintsev, et al. Nanostructuring of thin silver films by Ar cluster ions. Thin Solid Films 809, 140578 (2025). DOI: 10.1016/j.tsf.2024.140578
[82] D.R. Bessmertnyj, A.E. Ieshkin. Model’ formirovaniya nanorel’efa poverhnosti pri obluchenii gazovymi klasternymi ionami. VMU. Seriya 3. Fizika. Astronomiya 79, 2410302 (2024). DOI: 10.55959/MSU0579-9392.79.2410302
[83] J.C. Jiménez-Sáez, S. Muñoz, P. Palacios. Nanoscale pattern formation on surfaces by cluster ion beam irradiation. Physica Scripta 99, 085984 (2024). DOI: 10.1088/1402-4896/ad63de
[84] .C. Jiménez-Sáez, S. Muñoz, P. Palacios. Cluster ion beam irradiation at low energy and surface pattern formation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 563, 165707 (2025). DOI: 10.1016/j.nimb.2025.165707
[85] V.S. Chernysh. O preimushchestvennom raspylenii splavov pri ionnoj bombardirovke. Vestnik Moskovskogo Universiteta. Seriya 3. Fizika. Astronomiya 79, 1, 2410301 (2024).
[86] R. Behrish ed. Sputtering by Particle Bombardment II. Berlin, Heidelberg: Springer Berlin Heidelberg, 1983.
[87] R. Simpson, R.G. White, J.F. Watts, M.A. Baker. XPS investigation of monatomic and cluster argon ion sputtering of tantalum pentoxide. Applied Surface Science 405, 79 (2017). DOI: 10.1016/j.apsusc.2017.02.006
[88] D.-J. Yun, Y. Lee, H. Lee, et al. Precise electronic structure analysis of inorganic thin films by highly optimized argon-gas-cluster ion-beam sputtering. Applied Materials Today 45, 102830 (2025). DOI: 10.1016/j.apmt.2025.102830
[89] A.A. Ellsworth, C.N. Young, W.F. Stickle, A.V. Walker. New horizons in sputter depth profiling
inorganics with giant gas cluster sources: Niobium oxide thin films. Surface and Interface Analysis 49, 991 (2017). DOI: 10.1002/sia.6259
[90] A.G. Shard, M.A. Baker. Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning. Journal of Vacuum Science & Technology A 42, 5, (2024). DOI: 10.1116/6.0003681
[91] M.C. Burrell, E. Gillman. XPS investigation of monoatomic and cluster argon sputtering of zirconium dioxide. Journal of Vacuum Science & Technology A 41, 4, (2023). DOI: 10.1116/6.0002630
[92] C. Moore, J. Moon, D. Chidambaram. Using sputtering parameters to mitigate argon ion sputtering induced reduction of nickel in XPS. Applied Surface Science 659, 159876 (2024). DOI: 10.1016/j.apsusc.2024.159876
[93] A.E. Ieshkin, D.S. Kireev, A.A. Tatarintsev, V.S. Chernysh, B.R. Senatulin, E.A. Skryleva. Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation. Surface Science 700, 121637 (2020). DOI: 10.1016/J.SUSC.2020.121637
[94] V.S. Chernysh, A.E. Ieshkin, D.S. Kireev, D.K. Minnebaev, E.A. Skryleva, B.R. Senatulin. Preimushchestvennoe raspylenie pri obluchenii splavov gazovymi klasternymi ionami. Zhurnal tekhnicheskoj fiziki 92, 1943 (2022). DOI: 10.21883/JTF.2022.12.53761.141-22
[95] A.E. Ieshkin, V.S. Chernysh, D.S. Kireev, B.R. Senatulin, E.A. Skryleva. Preimushchestvennoe raspylenie splava NiTi atomarnymi i klasternymi ionami. Pis’ma v zhurnal tekhnicheskoj fiziki 49, 34 (2023). DOI: 10.21883/PJTF.2023.11.55536.19447
[96] V.S. Chernysh, A.E. Ieshkin, D.S. Kireev, A.A. Tatarintsev, B.R. Senatulin, E.A. Skryleva. Surface modification of NiTi alloy by ion and gas cluster ion irradiation. The role of chemical segregation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 554, 165463 (2024). DOI: 10.1016/J.NIMB.2024.165463
[97] A.V. Nazarov, D.S. Kireev, E.S. Kosenyuk i dr. Modifikaciya topografii i sostava poverhnosti nikelevogo supersplava pri obluchenii gazovymi klasternymi ionami. Vestnik Moskovskogo Universiteta. Seriya 3. Fizika. Astronomiya 80, 2540302 (2025).
[98] N.G. Korobeishchikov, I.V. Nikolaev, M.A. Roenko, et al. Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions. Vacuum 179, 109555 (2020). DOI: 10.1016/j.vacuum.2020.109555
[99] G.R.N. Defoort-Levkov, A. Bahm, P. Philipp. Influence of water contamination on the sputtering of silicon with low-energy argon ions investigated by molecular dynamics simulations. Beilstein Journal of Nanotechnology 13, 986 (2022). DOI: 10.3762/bjnano.13.86
[100] W.K. Chu, Y.P. Li, J.R. Liu, et al. Smoothing of YBa₂Cu₃O_7-u03b4 films by ion cluster beam bombardment. Applied Physics Letters 72, 246 (1998). DOI: 10.1063/1.120699
[101] M.S. Hatzistergos, H. Efstathiadis, E. Lifshin, et al. Microstructural and electrical characterization of gas cluster ion beam-smoothed YBCO films. IEEE Transactions on Applied Superconductivity 13, 2470 (2003). DOI: 10.1109/TASC.2003.811823
[102] M.S. Hatzistergos, H. Efstathiadis, J.L. Reeves, et al. Microstructural and compositional analysis of YBa₂Cu₃O_7u2212u03b4 films grown by MOCVD before and after GCIB smoothing. Physica C: Superconductivity 405, 179 (2004). DOI: 10.1016/j.physc.2004.01.024
[103] Ch. Tomaschko, Ch. Schoppmann, M. Kraus, et al. MeV cluster ion induced defect production in high Tc superconductors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 117, 90 (1996). DOI: 10.1016/0168-583X(96)00279-0
[104] D.R. Swenson, E. Degenkolb, Z. Insepov. Study of gas cluster ion beam surface treatments for mitigating RF breakdown. Physica C: Superconductivity 441, 75 (2006). DOI: 10.1016/j.physc.2006.03.039